A Study on the Effect of Etch Hole Position on the Micromachined Half-Coaxial Transmission Line Filter Responses

KMEMS 2006, The 8th Korean Conference on Micro Electro Mechanical Systems, Jeju, Korea, April 6-8, 2006, pp. 292-295.

Authors: Y. Kim, I. Llamas, C. Baek, Y. Kim,
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