Fabrication of a Single-Pole Double-Throw silicon RF MEMS ohmic contact Switch operating from 50 to 70 GHz

in Proocidings of 16th International Symposium on RF-MEMS and RF-MICROSYSTEMS, 29-1 June 2015, Barcelona, Spain.

Authors: S. Sim, Y. Su Lee, Y. Jang, Y. Lee, Y. Kim, , J.Mu-Kim
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