SU-8 Microfabrication for a Ka-Band Filter

MEMSWAVE, 4th Workshop on MEMS for millimeter wave communications, LAAS-CNRS, Toulouse, France, 2nd – 4th of July 2003. pp. F55-F58.

Authors: I. Llamas, K.Jiang, P.Jin, a. M.J.Lancaster,
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